Manufacture and Development of Multilayer Diffraction Gratings
- Laboratory for Laser Energetics, University fo Rochester, Rochester, NY
The OMEGA EP Facility includes two high-energy, short-pulse laser beams that will be focused to high intensity in the OMEGA target chamber, providing backlighting of compressed fusion targets and investigating the fast-ignition concept. To produce 2.6 kJ output energy per beam, developments in grating compressor technology are required. Gold-coated diffraction gratings limit on-target energy because of their low damage fluence. Multilayer dielectric (MLD) gratings have shown promise as high-damage-threshold, high-efficiency diffraction gratings suitable for use in high-energy chirped-pulse amplification. This paper details the manufacture and development of these gratings, including the specifics of the MLD coating, holographic lithography, reactive ion etching, reactive ion-beam cleaning, and wet chemical cleaning.
- Research Organization:
- Laboratory for Laser Energetics, University of Rochester, Rochester, NY
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- FC52-92SF19460
- OSTI ID:
- 876677
- Report Number(s):
- DOE/SF/19460-658; 1619; 2005-80
- Journal Information:
- in Laser-Induced Damage in Optical Materials: 2005, edited by G. J. Exarhos, A. H. Guenther, K. L. Lewis, D. Ristau, M. J. Soileau, and C. J. Stolz (SPIE, Bellingham, WA, 2005), Journal Name: in Laser-Induced Damage in Optical Materials: 2005, edited by G. J. Exarhos, A. H. Guenther, K. L. Lewis, D. Ristau, M. J. Soileau, and C. J. Stolz (SPIE, Bellingham, WA, 2005) Vol. 5991
- Country of Publication:
- United States
- Language:
- English
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