Lithographic characterization of the flare in the Berkeley 0.3numerical aperture extreme ultraviolet microfield optic
Journal Article
·
· Journal of Vacuum Science & Technology B
No abstract prepared.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE Director, Office of Science. Office of Basic EnergySciences
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 899735
- Report Number(s):
- LBNL-60343; R&D Project: 509201; BnR: KC0202030; TRN: US200709%%104
- Journal Information:
- Journal of Vacuum Science & Technology B, Vol. 24, Issue 3; Related Information: Journal Publication Date: May/Jun 2006
- Country of Publication:
- United States
- Language:
- English
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