Ion implantation post-processing of amorphous carbon films
Journal Article
·
· Diamond and Related Materials
OSTI ID:898935
No abstract prepared.
- Research Organization:
- Ernest Orlando Lawrence Berkeley NationalLaboratory, Berkeley, CA (US)
- Sponsoring Organization:
- USDOE Director, Office of Science. Office of High Energy andNuclear Physics
- DOE Contract Number:
- AC02-05CH11231
- OSTI ID:
- 898935
- Report Number(s):
- LBNL--43352
- Journal Information:
- Diamond and Related Materials, Journal Name: Diamond and Related Materials Journal Issue: 2 Vol. 8
- Country of Publication:
- United States
- Language:
- English
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