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Ion implantation post-processing of amorphous carbon films

Journal Article · · Diamond and Related Materials
OSTI ID:898935

No abstract prepared.

Research Organization:
Ernest Orlando Lawrence Berkeley NationalLaboratory, Berkeley, CA (US)
Sponsoring Organization:
USDOE Director, Office of Science. Office of High Energy andNuclear Physics
DOE Contract Number:
AC02-05CH11231
OSTI ID:
898935
Report Number(s):
LBNL--43352
Journal Information:
Diamond and Related Materials, Journal Name: Diamond and Related Materials Journal Issue: 2 Vol. 8
Country of Publication:
United States
Language:
English

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