Significant Improvement in Silicon Chemical Vapor Deposition Epitaxy Above the Surface Dehydrogenation Temperature
Journal Article
·
· Journal of Applied Physics
No abstract prepared.
- Research Organization:
- National Renewable Energy Lab. (NREL), Golden, CO (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC36-99-GO10337
- OSTI ID:
- 897797
- Journal Information:
- Journal of Applied Physics, Vol. 100, Issue 9, 2006; Related Information: Article No. 093520
- Country of Publication:
- United States
- Language:
- English
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