Roughness, Impurities and Strain in Low-Temperature Epitaxial Silicon Films Grown by Tantalum Filament Hot-Wire Chemical Vapor Deposition
Conference
·
OSTI ID:908190
Abstract not provided
- Research Organization:
- National Renewable Energy Laboratory (NREL), Golden, CO.
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC36-99GO10337
- OSTI ID:
- 908190
- Country of Publication:
- United States
- Language:
- English
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