Advancing the ion beam thin film planarization process for thesmoothing of substrate particles
Journal Article
·
· Microelectronic Engineering
OSTI ID:895532
- Research Organization:
- COLLABORATION - Lawrence Livermore NationalLaboratory
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 895532
- Report Number(s):
- LBNL-60968; R&D Project: 509201; BnR: KC0202030
- Journal Information:
- Microelectronic Engineering, Vol. 77, Issue 3-4; Related Information: Journal Publication Date: April 2005
- Country of Publication:
- United States
- Language:
- English
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