Controller strategy for a 6 DOF piezoelectric translation stage
Conference
·
OSTI ID:894344
A controller for the third generation, 6 degree-of-freedom (DOF) piezoelectric translation stage shown in Figure 1 is presented. This was tested by monitoring all six coordinate motions using an orthogonal array of six, high-resolution capacitance gages. The full 6 DOF matrix transformations and controller block diagrams for this system have been measured and the system operated under closed loop control. Results of early experiments to determine the 21 open loop response functions as well as preliminary results showing the closed loop response for the 3 linear translations are presented in this abstract. The ultimate goal of this project is to incorporate this 6 DOF stage within a long range X-Y scanning system for nanometer pick-and-place capability over an area of 50 x 50 mm. The control strategy and early results from this system will be presented.
- Research Organization:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 894344
- Report Number(s):
- UCRL-PROC-220093
- Country of Publication:
- United States
- Language:
- English
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