Six degree of freedom fine motion positioning stage based on magnetic levitation
Conference
·
OSTI ID:10178477
- Arling (R.W.), Windham, NH (United States)
- Sandia National Labs., Albuquerque, NM (United States)
The design of a magnetically suspended six degree of freedom positioning system capable of nanometer positioning is presented. The sample holder is controlled in six degrees of freedom (DOF) over 300 micrometers of travel in X, Y and Z directions. A design and control summary, and test results indicating stability and power dissipation are included in the paper. The system is vacuum compatible, uses commercially available materials, and requires minimal assembly and setup.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 10178477
- Report Number(s):
- SAND--93-1597C; CONF-930840--1; ON: DE93017651
- Country of Publication:
- United States
- Language:
- English
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