Thermal Oxidation of Aluminum Nitride Powder

Journal Article · Mon Jul 31 04:00:00 EDT 2006 · Journal of the American Ceramic Society

DOI:https://doi.org/10.1111/j.1551-2916.2006.01065.x· OSTI ID:889528

Gu, Zheng; Edgar, James H; Wang, Chong M; Coffey, Dorothy

The kinetics of the thermal oxidation of AlN powder in flowing oxygen over temperatures from 800 to 1150 C and the morphology and crystallinity of the resultant oxide were determined. The oxidation of two types of AlN powder was investigated and compared. Complex difference in the oxidation behavior was observed, probably due to their different morphology, particle size, particle size distribution, and residual impurities. Amorphous alumina formed at relatively low oxidation temperatures (800-1000 C), with a linear oxidation rate governed by interfacial reaction. Crystalline alumina formed at higher temperatures (>1000 C), and the oxidation rate was parabolic which suggested an oxidant diffusion controlled process.

• Research Organization: Pacific Northwest National Laboratory (PNNL), Richland, WA (US), Environmental Molecular Sciences Laboratory (EMSL)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC05-76RL01830
• OSTI ID: 889528
• Report Number(s): PNNL-SA-47066; 9609; KP1303000
• Journal Information: Journal of the American Ceramic Society, Journal Name: Journal of the American Ceramic Society Journal Issue: 7 Vol. 89; ISSN 0002-7820; ISSN JACTAW
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALUMINIUM NITRIDES
ALUMINIUM OXIDES
CRYSTAL STRUCTURE
DIFFUSION
Environmental Molecular Sciences Laboratory
IMPURITIES
KINETICS
MORPHOLOGY
OXIDATION
OXIDIZERS
PARTICLE SIZE
electron microprobe
kinetics
oxidation
powder
semiconductor
x-ray diffraction (XRD)