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MEMS characterization LDRD:Final report (FY03-FY05).

Technical Report ·
DOI:https://doi.org/10.2172/883489· OSTI ID:883489
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No abstract prepared.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
883489
Report Number(s):
SAND2005-7083
Country of Publication:
United States
Language:
English

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Related Subjects

42 ENGINEERING
Aging tests (Materials)
MICROELECTRONIC CIRCUITS
MINIATURIZATION
Mass spectrometry.
Microelectromechanical systems.
Molecular integrated microsystems.
TECHNOLOGY ASSESSMENT