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Title: MEMS characterization LDRD:Final report (FY03-FY05).

Technical Report ·
DOI:https://doi.org/10.2172/883489· OSTI ID:883489

No abstract prepared.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
883489
Report Number(s):
SAND2005-7083; TRN: US200614%%653
Country of Publication:
United States
Language:
English