MEMS characterization LDRD:Final report (FY03-FY05).

Ordonez, Therese A; Zavadil, Kevin Robert; Brown, Jason R; Kent, Michael Stuart; Simpson, Regina Lynn; Tallant, David Robert; Ohlhausen, James Anthony; Garcia, Manuel Joseph; Thornberg, Steven Michael

doi:10.2172/883489

Title: MEMS characterization LDRD:Final report (FY03-FY05).

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Abstract

No abstract prepared.

Authors:: Ordonez, Therese A; Zavadil, Kevin Robert; Brown, Jason R; Kent, Michael Stuart; Simpson, Regina Lynn; Tallant, David Robert; Ohlhausen, James Anthony; Garcia, Manuel Joseph; Thornberg, Steven Michael

Publication Date:: Thu Dec 01 00:00:00 EST 2005

Research Org.:: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 883489

Report Number(s):: SAND2005-7083
TRN: US200614%%653

DOE Contract Number:: AC04-94AL85000

Resource Type:: Technical Report

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING; MICROELECTRONIC CIRCUITS; MINIATURIZATION; TECHNOLOGY ASSESSMENT; Aging tests (Materials); Molecular integrated microsystems.; Mass spectrometry.; Microelectromechanical systems.

Citation Formats


                    Ordonez, Therese A, Zavadil, Kevin Robert, Brown, Jason R, Kent, Michael Stuart, Simpson, Regina Lynn, Tallant, David Robert, Ohlhausen, James Anthony, Garcia, Manuel Joseph, and Thornberg, Steven Michael. MEMS characterization LDRD:Final report (FY03-FY05)..  United States: N. p., 2005. 
        Web.  doi:10.2172/883489.

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                    Ordonez, Therese A, Zavadil, Kevin Robert, Brown, Jason R, Kent, Michael Stuart, Simpson, Regina Lynn, Tallant, David Robert, Ohlhausen, James Anthony, Garcia, Manuel Joseph, & Thornberg, Steven Michael. MEMS characterization LDRD:Final report (FY03-FY05)..  United States.  https://doi.org/10.2172/883489

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                    Ordonez, Therese A, Zavadil, Kevin Robert, Brown, Jason R, Kent, Michael Stuart, Simpson, Regina Lynn, Tallant, David Robert, Ohlhausen, James Anthony, Garcia, Manuel Joseph, and Thornberg, Steven Michael. 2005.  
        "MEMS characterization LDRD:Final report (FY03-FY05).".  United States.  https://doi.org/10.2172/883489.  https://www.osti.gov/servlets/purl/883489.

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@article{osti_883489,

  title        = {MEMS characterization LDRD:Final report (FY03-FY05).},

  author       = {Ordonez, Therese A and Zavadil, Kevin Robert and Brown, Jason R and Kent, Michael Stuart and Simpson, Regina Lynn and Tallant, David Robert and Ohlhausen, James Anthony and Garcia, Manuel Joseph and Thornberg, Steven Michael},

  abstractNote = {No abstract prepared.},

  doi          = {10.2172/883489},

  url          = {https://www.osti.gov/biblio/883489},
  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Thu Dec 01 00:00:00 EST 2005},

  month        = {Thu Dec 01 00:00:00 EST 2005}

}

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