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Advanced three-dimensional MEMS by complimentary laser micro manufacturing.

Conference ·
OSTI ID:876376
; ;  [1];  [1];  [2];
  1. University of Texas, El Paso, TX
  2. Pennsylvania State University, Freeport, PA
+ Show Author Affiliations

No abstract prepared.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
876376
Report Number(s):
SAND2005-7638C
Country of Publication:
United States
Language:
English

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Related Subjects

42 ENGINEERING
LASERS
MANUFACTURING
MEMORY DEVICES