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U.S. Department of Energy
Office of Scientific and Technical Information
 

Low leak rate MEMS valves for micro-gas-analyzer flow control.

Conference ·
OSTI ID:950679
; ; ; ; ; ;

No abstract prepared.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
950679
Report Number(s):
SAND2009-1471C
Country of Publication:
United States
Language:
English

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Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
FLOW REGULATORS
GAS ANALYSIS
MINIATURIZATION
VALVES