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MEMS and ta-C thin films: overview of devices.

Conference ·
OSTI ID:876317
;  [1]; ;  [2]; ; ;  [3];  [3]; ;  [4]; ; ; ;  [4];
  1. Argonne National Laboratory
  2. Argonne National Laboratory
  3. Northwestern University
  4. University of Virginia
+ Show Author Affiliations
No abstract prepared.
Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
876317
Report Number(s):
SAND2004-4427C
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
99 GENERAL AND MISCELLANEOUS
CARBON
DESIGN
MEMORY DEVICES
TANTALUM
THIN FILMS