Chemical preconcentrator with integral thermal flow sensor
Patent
·
OSTI ID:875083
- Albuquerque, NM
- Cedar Crest, NM
A chemical preconcentrator with integral thermal flow sensor can be used to accurately measure fluid flow rate in a microanalytical system. The thermal flow sensor can be operated in either constant temperature or constant power mode and variants thereof. The chemical preconcentrator with integral thermal flow sensor can be fabricated with the same MEMS technology as the rest of the microanlaytical system. Because of its low heat capacity, low-loss, and small size, the chemical preconcentrator with integral thermal flow sensor is fast and efficient enough to be used in battery-powered, portable microanalytical systems.
- Research Organization:
- SANDIA CORP
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- US 6527835
- OSTI ID:
- 875083
- Country of Publication:
- United States
- Language:
- English
A Microsensor With Integrated Heat Sink And Flow Guide For Gas Flow Sensing Applications
|
conference | June 1995 |
A high sensitivity CMOS gas flow sensor on a thin dielectric membrane
|
journal | June 1993 |
Integrated smart two-dimensional thermal flow sensor with Seebeck-voltage-to-frequency conversion
|
journal | March 1992 |
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/96/55/73/
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