Capacitive chemical sensor
A microfabricated capacitive chemical sensor can be used as an autonomous chemical sensor or as an analyte-sensitive chemical preconcentrator in a larger microanalytical system. The capacitive chemical sensor detects changes in sensing film dielectric properties, such as the dielectric constant, conductivity, or dimensionality. These changes result from the interaction of a target analyte with the sensing film. This capability provides a low-power, self-heating chemical sensor suitable for remote and unattended sensing applications. The capacitive chemical sensor also enables a smart, analyte-sensitive chemical preconcentrator. After sorption of the sample by the sensing film, the film can be rapidly heated to release the sample for further analysis. Therefore, the capacitive chemical sensor can optimize the sample collection time prior to release to enable the rapid and accurate analysis of analytes by a microanalytical system.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- 8,736,000
- Application Number:
- 11/583,442
- OSTI ID:
- 1132610
- Country of Publication:
- United States
- Language:
- English
Gas-phase selective etching of native oxide
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journal | January 1990 |
Nanoporous-carbon films for microsensor preconcentrators
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journal | May 2002 |
Etching of thin SiO 2 layers using wet HF gas
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journal | May 1989 |
Mechanisms of the HF/H 2 O vapor phase etching of SiO 2
|
journal | July 1992 |
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