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Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement

Patent ·
OSTI ID:874992
 [1];  [1]
  1. Albuquerque, NM
+ Show Author Affiliations

A compact electrostatic actuator is disclosed for microelectromechanical (MEM) applications. The actuator utilizes stationary and moveable electrodes, with the stationary electrodes being formed on a substrate and the moveable electrodes being supported above the substrate on a frame. The frame provides a rigid structure which allows the electrostatic actuator to be operated at high voltages (up to 190 Volts) to provide a relatively large actuation force compared to conventional electrostatic comb actuators which are much larger in size. For operation at its maximum displacement, the electrostatic actuator is relatively insensitive to the exact value of the applied voltage and provides a self-limiting displacement.

Research Organization:
SANDIA CORP
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
US 6507138
OSTI ID:
874992
Country of Publication:
United States
Language:
English

References (4)

Comb actuators for xy-microstages journal September 1993
Design, fabrication, and operation of submicron gap comb-drive microactuators journal March 1992
Laterally Driven Polysilicon Resonant Microstructures journal November 1989
Comb-drive actuators for large displacements journal September 1996

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