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Micromachine friction test apparatus

Patent ·
OSTI ID:874711
 [1];  [1];  [2]
  1. Albuquerque, NM
  2. Cedar Crest, NM
+ Show Author Affiliations

A microelectromechanical (MEM) friction test apparatus is disclosed for determining static or dynamic friction in MEM devices. The friction test apparatus, formed by surface micromachining, is based on a friction pad supported at one end of a cantilevered beam, with the friction pad overlying a contact pad formed on the substrate. A first electrostatic actuator can be used to bring a lower surface of the friction pad into contact with an upper surface of the contact pad with a controlled and adjustable force of contact. A second electrostatic actuator can then be used to bend the cantilevered beam, thereby shortening its length and generating a relative motion between the two contacting surfaces. The displacement of the cantilevered beam can be measured optically and used to determine the static or dynamic friction, including frictional losses and the coefficient of friction between the surfaces. The test apparatus can also be used to assess the reliability of rubbing surfaces in MEM devices by producing and measuring wear of those surfaces. Finally, the friction test apparatus, which is small in size, can be used as an in situ process quality tool for improving the fabrication of MEM devices.

Research Organization:
SANDIA CORP
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
US 6446486
OSTI ID:
874711
Country of Publication:
United States
Language:
English

References (5)

Improved Autoadhesion Measurement Method for Micromachined Polysilicon Beams journal January 1996
Polysilicon microstructures to characterize static friction
  • Lim, M. G.; Chang, J. C.; Schultz, D. P.
  • IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. https://doi.org/10.1109/MEMSYS.1990.110254
conference January 1990
The shuffle motor: a high force, high precision linear electrostatic stepper motor conference January 1997
Lubrication of polysilicon micromechanisms with self-assembled monolayers report June 1998
A hinged-pad test structure for sliding friction measurement in micromachining conference September 1998

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Related Subjects

/73/
actuator
adjustable
apparatus
assess
based
beam
bend
bring
cantilevered
coefficient
contact
contacting
controlled
determine
determining
devices
disclosed
displacement
dynamic
electrostatic
fabrication
finally
force
formed
friction
frictional
generating
improving
including
length
losses
measured
measuring
microelectromechanical
micromachine
micromachining
motion
optically
overlying
pad
process
producing
quality
reliability
rubbing
shortening
situ
size
static
substrate
supported
surface
surface micromachining
surfaces
tool
upper
upper surface
wear