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Title: Micromachine friction test apparatus

Patent ·
OSTI ID:874711
 [1];  [1];  [2]
  1. Albuquerque, NM
  2. Cedar Crest, NM
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A microelectromechanical (MEM) friction test apparatus is disclosed for determining static or dynamic friction in MEM devices. The friction test apparatus, formed by surface micromachining, is based on a friction pad supported at one end of a cantilevered beam, with the friction pad overlying a contact pad formed on the substrate. A first electrostatic actuator can be used to bring a lower surface of the friction pad into contact with an upper surface of the contact pad with a controlled and adjustable force of contact. A second electrostatic actuator can then be used to bend the cantilevered beam, thereby shortening its length and generating a relative motion between the two contacting surfaces. The displacement of the cantilevered beam can be measured optically and used to determine the static or dynamic friction, including frictional losses and the coefficient of friction between the surfaces. The test apparatus can also be used to assess the reliability of rubbing surfaces in MEM devices by producing and measuring wear of those surfaces. Finally, the friction test apparatus, which is small in size, can be used as an in situ process quality tool for improving the fabrication of MEM devices.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
US 6446486
OSTI ID:
874711
Country of Publication:
United States
Language:
English

References (5)

A hinged-pad test structure for sliding friction measurement in micromachining conference September 1998
Lubrication of polysilicon micromechanisms with self-assembled monolayers report June 1998
Improved Autoadhesion Measurement Method for Micromachined Polysilicon Beams journal January 1996
Polysilicon microstructures to characterize static friction
  • Lim, M. G.; Chang, J. C.; Schultz, D. P.
  • IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. https://doi.org/10.1109/MEMSYS.1990.110254
conference January 1990
The shuffle motor: a high force, high precision linear electrostatic stepper motor conference January 1997

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micromachine
friction
apparatus
microelectromechanical
disclosed
determining
static
dynamic
devices
formed
surface
micromachining
based
pad
supported
cantilevered
beam
overlying
contact
substrate
electrostatic
actuator
bring
upper
controlled
adjustable
force
bend
shortening
length
generating
motion
contacting
surfaces
displacement
measured
optically
determine
including
frictional
losses
coefficient
assess
reliability
rubbing
producing
measuring
wear
finally
size
situ
process
quality
tool
improving
fabrication
upper surface
surface micromachining
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