Apparatus and method for fabricating a microbattery
Patent
·
OSTI ID:874649
- Albuquerque, NM
- Edgewood, NM
An apparatus and method for fabricating a microbattery that uses silicon as the structural component, packaging component, and semiconductor to reduce the weight, size, and cost of thin film battery technology is described. When combined with advanced semiconductor packaging techniques, such a silicon-based microbattery enables the fabrication of autonomous, highly functional, integrated microsystems having broad applicability.
- Research Organization:
- SANDIA CORP
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- US 6432577
- OSTI ID:
- 874649
- Country of Publication:
- United States
- Language:
- English
Rechargeable thin-film lithium batteries
|
journal | May 1994 |
Thin-film rechargeable lithium batteries
|
journal | March 1995 |
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advanced
apparatus
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broad
combined
component
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described
enables
fabricating
fabrication
film
film battery
functional
highly
integrated
method
microbattery
microsystems
packaging
reduce
semiconductor
silicon
silicon-based
size
structural
structural component
techniques
technology
weight
advanced
apparatus
applicability
autonomous
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broad
combined
component
cost
described
enables
fabricating
fabrication
film
film battery
functional
highly
integrated
method
microbattery
microsystems
packaging
reduce
semiconductor
silicon
silicon-based
size
structural
structural component
techniques
technology
weight