Apparatus and method for fabricating a microbattery
Patent
·
OSTI ID:874649
- Albuquerque, NM
- Edgewood, NM
An apparatus and method for fabricating a microbattery that uses silicon as the structural component, packaging component, and semiconductor to reduce the weight, size, and cost of thin film battery technology is described. When combined with advanced semiconductor packaging techniques, such a silicon-based microbattery enables the fabrication of autonomous, highly functional, integrated microsystems having broad applicability.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- US 6432577
- OSTI ID:
- 874649
- Country of Publication:
- United States
- Language:
- English
Rechargeable thin-film lithium batteries
|
journal | May 1994 |
Thin-film rechargeable lithium batteries
|
journal | March 1995 |
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Related Subjects
apparatus
method
fabricating
microbattery
silicon
structural
component
packaging
semiconductor
reduce
weight
size
cost
film
battery
technology
described
combined
advanced
techniques
silicon-based
enables
fabrication
autonomous
highly
functional
integrated
microsystems
broad
applicability
film battery
structural component
/429/
method
fabricating
microbattery
silicon
structural
component
packaging
semiconductor
reduce
weight
size
cost
film
battery
technology
described
combined
advanced
techniques
silicon-based
enables
fabrication
autonomous
highly
functional
integrated
microsystems
broad
applicability
film battery
structural component
/429/