Chemical vapor deposition techniques and related methods for manufacturing microminiature thermionic converters

Patent · Tue Jun 25 00:00:00 EDT 2002

OSTI ID:874544

King, Donald B ^[1]; Sadwick, Laurence P ^[2]; Wernsman, Bernard R ^[3]

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1. Albuquerque, NM
2. Salt Lake City, UT
3. Clairton, PA

Methods of manufacturing microminiature thermionic converters (MTCs) having high energy-conversion efficiencies and variable operating temperatures using MEMS manufacturing techniques including chemical vapor deposition. The MTCs made using the methods of the invention incorporate cathode to anode spacing of about 1 micron or less and use cathode and anode materials having work functions ranging from about 1 eV to about 3 eV. The MTCs also exhibit maximum efficiencies of just under 30%, and thousands of the devices can be fabricated at modest costs.

• Research Organization: SANDIA CORP
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 6411007
• Application Number: 09/895,372
• OSTI ID: 874544
• Country of Publication: United States
• Language: English

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deposition
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efficiencies
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including
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mems
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microminiature
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modest
mtcs
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spacing
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thousands
vapor
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