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Title: Chemical vapor deposition techniques and related methods for manufacturing microminiature thermionic converters

Abstract

Methods of manufacturing microminiature thermionic converters (MTCs) having high energy-conversion efficiencies and variable operating temperatures using MEMS manufacturing techniques including chemical vapor deposition. The MTCs made using the methods of the invention incorporate cathode to anode spacing of about 1 micron or less and use cathode and anode materials having work functions ranging from about 1 eV to about 3 eV. The MTCs also exhibit maximum efficiencies of just under 30%, and thousands of the devices can be fabricated at modest costs.

Inventors:
 [1];  [2];  [3]
  1. Albuquerque, NM
  2. Salt Lake City, UT
  3. Clairton, PA
Publication Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
874544
Patent Number(s):
US 6411007
Application Number:
09/895,372
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-96AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
chemical; vapor; deposition; techniques; related; methods; manufacturing; microminiature; thermionic; converters; mtcs; energy-conversion; efficiencies; variable; operating; temperatures; mems; including; incorporate; cathode; anode; spacing; micron; materials; functions; ranging; exhibit; maximum; 30; thousands; devices; fabricated; modest; costs; vapor deposition; chemical vapor; operating temperature; anode material; related method; conversion efficiencies; deposition technique; /310/136/

Citation Formats

King, Donald B, Sadwick, Laurence P, and Wernsman, Bernard R. Chemical vapor deposition techniques and related methods for manufacturing microminiature thermionic converters. United States: N. p., 2002. Web.
King, Donald B, Sadwick, Laurence P, & Wernsman, Bernard R. Chemical vapor deposition techniques and related methods for manufacturing microminiature thermionic converters. United States.
King, Donald B, Sadwick, Laurence P, and Wernsman, Bernard R. 2002. "Chemical vapor deposition techniques and related methods for manufacturing microminiature thermionic converters". United States. https://www.osti.gov/servlets/purl/874544.
@article{osti_874544,
title = {Chemical vapor deposition techniques and related methods for manufacturing microminiature thermionic converters},
author = {King, Donald B and Sadwick, Laurence P and Wernsman, Bernard R},
abstractNote = {Methods of manufacturing microminiature thermionic converters (MTCs) having high energy-conversion efficiencies and variable operating temperatures using MEMS manufacturing techniques including chemical vapor deposition. The MTCs made using the methods of the invention incorporate cathode to anode spacing of about 1 micron or less and use cathode and anode materials having work functions ranging from about 1 eV to about 3 eV. The MTCs also exhibit maximum efficiencies of just under 30%, and thousands of the devices can be fabricated at modest costs.},
doi = {},
url = {https://www.osti.gov/biblio/874544}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 25 00:00:00 EDT 2002},
month = {Tue Jun 25 00:00:00 EDT 2002}
}

Works referenced in this record:

The microminiature thermionic converter
conference, January 2001