Method to fabricate layered material compositions

Patent · Tue Jan 01 00:00:00 EST 2002

OSTI ID:874292

Fleming, James G ^[1]; Lin, Shawn-Yu ^[1]

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1. Albuquerque, NM

A new class of processes suited to the fabrication of layered material compositions is disclosed. Layered material compositions are typically three-dimensional structures which can be decomposed into a stack of structured layers. The best known examples are the photonic lattices. The present invention combines the characteristic features of photolithography and chemical-mechanical polishing to permit the direct and facile fabrication of, e.g., photonic lattices having photonic bandgaps in the 0.1-20.mu. spectral range.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 6358854
• OSTI ID: 874292
• Country of Publication: United States
• Language: English

Related Subjects

method
fabricate
layered
material
compositions
processes
suited
fabrication
disclosed
typically
three-dimensional
structures
decomposed
stack
structured
layers
examples
photonic
lattices
combines
characteristic
features
photolithography
chemical-mechanical
polishing
permit
direct
facile
bandgaps
01-20mu
spectral
range
dimensional structure
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