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Title: Method to fabricate layered material compositions

Patent ·
OSTI ID:1175114

A new class of processes suited to the fabrication of layered material compositions is disclosed. Layered material compositions are typically three-dimensional structures which can be decomposed into a stack of structured layers. The best known examples are the photonic lattices. The present invention combines the characteristic features of photolithography and chemical-mechanical polishing to permit the direct and facile fabrication of, e.g., photonic lattices having photonic bandgaps in the 0.1-20.mu. spectral range.

Research Organization:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation
Patent Number(s):
6,812,482
Application Number:
09/941,820
OSTI ID:
1175114
Country of Publication:
United States
Language:
English

References (1)

Photonic Band Calculations for Woodpile Structures journal February 1994