Mesoporous silica film from a solution containing a surfactant and methods of making same

Liu, Jun; Domansky, Karel; Li, Xiaohong; Fryxell, Glen E; Baskaran, Suresh; Kohler, Nathan J; Thevuthasan, Suntharampillai; Coyle, Christopher A; Birnbaum, Jerome C

Mesoporous silica film from a solution containing a surfactant and methods of making same

Patent · Mon Dec 10 23:00:00 EST 2001

OSTI ID:874160

Liu, Jun ^[1]; Domansky, Karel ^[2]; Li, Xiaohong ^[3]; Fryxell, Glen E ^[4]; Baskaran, Suresh ^[4]; Kohler, Nathan J ^[3]; Thevuthasan, Suntharampillai ^[4]; Coyle, Christopher A ^[3]; Birnbaum, Jerome C ^[3]

West Richland, WA
Cambridge, MA
Richland, WA
Kennewick, WA

The present invention is a mesoporous silica film having a low dielectric constant and method of making having the steps of combining a surfactant in a silica precursor solution, spin-coating a film from this solution mixture, forming a partially hydroxylated mesoporous film, and dehydroxylating the hydroxylated film to obtain the mesoporous film. It is advantageous that the small polyoxyethylene ether surfactants used in spin-coated films as described in the present invention will result in fine pores smaller on average than about 20 nm. The resulting mesoporous film has a dielectric constant less than 3, which is stable in moist air with a specific humidity. The present invention provides a method for superior control of film thickness and thickness uniformity over a coated wafer, and films with low dielectric constant.

Research Organization:: Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC06-76RL01830

Assignee:: Battelle Memorial Institute (Richland, WA)

Patent Number(s):: US 6329017

Application Number:: 09/413,062

OSTI ID:: 874160

Country of Publication:: United States

Language:: English

References (13)

Free-standing and oriented mesoporous silica films grown at the air–water interface Yang, Hong; Coombs, Neil; Sokolov, Igor Nature, Vol. 381, Issue 6583 https://doi.org/10.1038/381589a0	journal	June 1996
Synthesis and Characterization of Hexagonally Packed Mesoporous Tantalum Oxide Molecular Sieves Antonelli, David M.; Ying, Jackie Y. Chemistry of Materials, Vol. 8, Issue 4, p. 874-881 https://doi.org/10.1021/cm9504697	journal	January 1996
Templating of Mesoporous Molecular Sieves by Nonionic Polyethylene Oxide Surfactants Bagshaw, S. A.; Prouzet, E.; Pinnavaia, T. J. Science, Vol. 269, Issue 5228 https://doi.org/10.1126/science.269.5228.1242	journal	September 1995
Synthesis of a Stable Hexagonally Packed Mesoporous Niobium Oxide Molecular Sieve Through a Novel Ligand-Assisted Templating Mechanism Antonelli, David M.; Ying, Jackie Y. Angewandte Chemie International Edition in English, Vol. 35, Issue 4 https://doi.org/10.1002/anie.199604261	journal	March 1996
Organization of Organic Molecules with Inorganic Molecular Species into Nanocomposite Biphase Arrays Huo, Qisheng; Margolese, David I.; Ciesla, Ulrike Chemistry of Materials, Vol. 6, Issue 8 https://doi.org/10.1021/cm00044a016	journal	August 1994
Mesoporous Silica Molecular Sieves Prepared by Ionic and Neutral Surfactant Templating: A Comparison of Physical Properties Tanev, Peter T.; Pinnavaia, Thomas J. Chemistry of Materials, Vol. 8, Issue 8 https://doi.org/10.1021/cm950549a	journal	January 1996
Ordered mesoporous molecular sieves synthesized by a liquid-crystal template mechanism Kresge, C. T.; Leonowicz, M. E.; Roth, W. J. Nature, Vol. 359, Issue 6397, p. 710-712 https://doi.org/10.1038/359710a0	journal	October 1992
Formation of a Porous Zirconium Oxo Phosphate with a High Surface Area by a Surfactant-Assisted Synthesis Ciesla, Ulrike; Schacht, Stefan; Stucky, Galen D. Angewandte Chemie International Edition in English, Vol. 35, Issue 5 https://doi.org/10.1002/anie.199605411	journal	March 1996
Synthesis of hybrid inorganic–organic mesoporous silica by co-condensation of siloxane and organosiloxane precursors Burkett, Sandra L.; Sims, Stephen D.; Mann, Stephen Chem. Commun., Issue 11 https://doi.org/10.1039/CC9960001367	journal	January 1996
Cooperative organization of inorganic-surfactant and biomimetic assemblies Firouzi, A.; Kumar, D.; Bull, L. Science, Vol. 267, Issue 5201 https://doi.org/10.1126/science.7855591	journal	February 1995
Recent advances in the synthesis, characterization and applications of mesoporous molecular sieves Beck, Jeffrey S.; Vartuli, James C. Current Opinion in Solid State and Materials Science, Vol. 1, Issue 1 https://doi.org/10.1016/S1359-0286(96)80014-3	journal	February 1996
A Neutral Templating Route to Mesoporous Molecular Sieves Tanev, P. T.; Pinnavaia, T. J. Science, Vol. 267, Issue 5199, p. 865-867 https://doi.org/10.1126/science.267.5199.865	journal	February 1995
A new family of mesoporous molecular sieves prepared with liquid crystal templates Beck, J. S.; Vartuli, J. C.; Roth, W. J. Journal of the American Chemical Society, Vol. 114, Issue 27, p. 10834-10843 https://doi.org/10.1021/ja00053a020	journal	December 1992

Similar Records

Method of dehydroxylating a hydroxylated material and method of making a mesoporous film

Patent · Tue May 07 00:00:00 EDT 2002 · OSTI ID:874403

Synthesis of periodic mesoporous silica thin films

Conference · Sat Jun 01 00:00:00 EDT 1996 · OSTI ID:242661

Effect of Humidity Treatments on Porosity and Mechanical Integrity of Mesoporous Silica Films

Journal Article · Thu May 15 00:00:00 EDT 2003 · Chemical Communications · OSTI ID:15004370

Related Subjects

/427/
20
advantageous
air
average
coated
combining
constant
containing
control
dehydroxylating
described
dielectric
film
film thickness
films
fine
forming
humidity
hydroxylated
mesoporous
method
methods
mixture
moist
nm
obtain
partially
polyoxyethylene
pores
porous silica
precursor
provides
result
resulting
silica
solution
specific
spin-coated
spin-coating
stable
steps
superior
surfactant
surfactants
thickness
uniformity
wafer

Mesoporous silica film from a solution containing a surfactant and methods of making same

Citation Formats

References (13)

Similar Records

Related Subjects