Optical method for the characterization of laterally-patterned samples in integrated circuits
Patent
·
OSTI ID:874134
- Barrington, RI
Disclosed is a method for characterizing a sample having a structure disposed on or within the sample, comprising the steps of applying a first pulse of light to a surface of the sample for creating a propagating strain pulse in the sample, applying a second pulse of light to the surface so that the second pulse of light interacts with the propagating strain pulse in the sample, sensing from a reflection of the second pulse a change in optical response of the sample, and relating a time of occurrence of the change in optical response to at least one dimension of the structure.
- Research Organization:
- Brown Univ., Providence, RI (United States)
- DOE Contract Number:
- FG02-86ER45267
- Assignee:
- Brown University Research Foundation (Providence, RI)
- Patent Number(s):
- US 6321601
- OSTI ID:
- 874134
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
optical
method
characterization
laterally-patterned
samples
integrated
circuits
disclosed
characterizing
sample
structure
disposed
comprising
steps
applying
pulse
light
surface
creating
propagating
strain
interacts
sensing
reflection
change
response
relating
time
occurrence
dimension
integrated circuit
structure disposed
optical method
/73/
method
characterization
laterally-patterned
samples
integrated
circuits
disclosed
characterizing
sample
structure
disposed
comprising
steps
applying
pulse
light
surface
creating
propagating
strain
interacts
sensing
reflection
change
response
relating
time
occurrence
dimension
integrated circuit
structure disposed
optical method
/73/