Electrostatically tunable resonance frequency beam utilizing a stress-sensitive film
Patent
·
OSTI ID:873874
- Knoxville, TN
- Oak Ridge, TN
- Kingston, TN
Methods and apparatus for detecting particular frequencies of acoustic vibration utilize an electrostatically-tunable beam element having a stress-sensitive coating and means for providing electrostatic force to controllably deflect the beam element thereby changing its stiffness and its resonance frequency. It is then determined from the response of the electrostatically-tunable beam element to the acoustical vibration to which the beam is exposed whether or not a particular frequency or frequencies of acoustic vibration are detected.
- Research Organization:
- LOCKHEED MARTIN ENERGY RES COR
- DOE Contract Number:
- AC05-96OR22464
- Assignee:
- UT-Battelle, LLC (Oak Ridge, TN)
- Patent Number(s):
- US 6263736
- OSTI ID:
- 873874
- Country of Publication:
- United States
- Language:
- English
Adsorption‐induced surface stress and its effects on resonance frequency of microcantilevers
|
journal | April 1995 |
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/73/310/361/
acoustic
acoustic vibration
acoustical
apparatus
beam
changing
coating
controllably
deflect
detected
detecting
determined
electrostatic
electrostatically
electrostatically-tunable
element
exposed
film
force
frequencies
frequency
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means
methods
particular
particular frequency
providing
resonance
resonance frequency
response
sensitive film
static force
stiffness
stress-sensitive
tunable
utilize
utilizing
vibration
acoustic
acoustic vibration
acoustical
apparatus
beam
changing
coating
controllably
deflect
detected
detecting
determined
electrostatic
electrostatically
electrostatically-tunable
element
exposed
film
force
frequencies
frequency
frequency beam
means
methods
particular
particular frequency
providing
resonance
resonance frequency
response
sensitive film
static force
stiffness
stress-sensitive
tunable
utilize
utilizing
vibration