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Method and apparatus for actively controlling a micro-scale flexural plate wave device

Patent ·
OSTI ID:873789

An actively controlled flexural plate wave device provides a micro-scale pump. A method of actively controlling a flexural plate wave device produces traveling waves in the device by coordinating the interaction of a magnetic field with actively controlled currents. An actively-controlled flexural plate wave device can be placed in a fluid channel and adapted for use as a micro-scale fluid pump to cool or drive micro-scale systems, for example, micro-chips, micro-electrical-mechanical devices, micro-fluid circuits, or micro-scale chemical analysis devices.

Research Organization:
SANDIA CORP
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
US 6247905
OSTI ID:
873789
Country of Publication:
United States
Language:
English

References (5)

Fluid motion produced by ultrasonic Lamb waves conference January 1990
Flexural plate wave resonator excited with Lorentz forces journal May 1998
Magnetically-excited flexural plate wave device report May 1997
Magnetically-excited flexural plate wave resonator
  • Martin, S. J.; Butler, M. A.; Spates, J. J.
  • IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 45, Issue 5 https://doi.org/10.1109/58.726465
journal September 1998
A multisensor employing an ultrasonic Lamb-wave oscillator journal June 1988