Aspects of the micro-scale acoustics of a fluid loaded flexural plate wave sensor
- Sandia National Labs., Albuquerque, NM (United States). Structural Dynamics Dept.
In this report, a study of wave propagation and damping in a fluid loaded Flexural Plate Wave (FPW) sensor is presented. Previous to this study, it was believed that supersonic radiation was the dominate mechanism of loss in FPW devices. However, because no previous theory had been developed to explain finite length effects, this belief was never challenged. In this paper, it will be shown that the dominate mechanism of damping is not only due to supersonic radiation, but is also due to a fluid/structure resonance arising from finite length effects. The two-dimensional equations of motion for a single port FPW sensor plate are derived and coupled to the equations of motion for a viscous Newtonian fluid. These coupled equations are solved by using a wave number transform approach. This approach captures dynamics due to source terms at infinity. The resulting solution is comprised of terms derived by Wenzel, plus additional terms representing diffracted wave dynamics. The displacement field above the plate is then determined by using the Helmholtz integral equation.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 548763
- Report Number(s):
- SAND--97-2772; ON: DE98001272; BR: YN0100000
- Country of Publication:
- United States
- Language:
- English
Similar Records
Modeling and Imaging Flexural Plate Wave Devices
Surface Micromachined Flexural Plate Wave Device Integrable on Silicon