Compound floating pivot micromechanisms

Patent · 24 April 2001

OSTI ID:873681

Garcia, Ernest J ^[1]

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1. Albuquerque, NM

A new class of tilting micromechanical mechanisms have been developed. These new mechanisms use compound floating pivot structures to attain far greater tilt angles than are practical using other micromechanical techniques. The new mechanisms are also capable of bi-directional tilt about multiple axes.

• Research Organization: SANDIA CORP
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 6220561
• Application Number: 09/346,501
• OSTI ID: 873681
• Country of Publication: United States
• Language: English

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