Compound floating pivot micromechanisms
Patent
·
OSTI ID:873681
- Albuquerque, NM
A new class of tilting micromechanical mechanisms have been developed. These new mechanisms use compound floating pivot structures to attain far greater tilt angles than are practical using other micromechanical techniques. The new mechanisms are also capable of bi-directional tilt about multiple axes.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- DOE Contract Number:
- AC04-94DP85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- US 6220561
- Application Number:
- 09/346,501
- OSTI ID:
- 873681
- Country of Publication:
- United States
- Language:
- English
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