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Capacitively readout multi-element sensor array with common-mode cancellation

Patent ·
OSTI ID:873469
 [1];  [1];  [2];  [1];  [1]
  1. Knoxville, TN
  2. Decatur, TN
+ Show Author Affiliations
An improved multi-element apparatus for detecting the presence of at least one chemical, biological or physical component in a monitored area comprising an array or single set of the following elements: a capacitive transducer having at least one cantilever spring element secured thereto, the cantilever element having an area thereof coated with a chemical having an affinity for the component to be detected; a pick-up plate positioned adjacent to the cantilever element at a distance such that a capacitance between the cantilever element and the pick-up plate changes as the distance between the cantilever element and the pick-up plate varies, the change in capacitance being a measurable variation; a detection means for measuring the measurable variation in the capacitance between the cantilever element and the pick-up plate that forms a measurement channel signal; and at least one feedback cantilever spring element positioned apart from the coated cantilever element, the cantilever element substantially unaffected by the component being monitored and providing a reference channel signal to the detection means that achieves a common mode cancellation between the measurement channel signal and reference channel signal.
Research Organization:
LOCKHEED MARTIN ENERGY RES COR
DOE Contract Number:
AC05-96OR22464
Assignee:
Lockheed Martin Energy Research Corporation (Oak Ridge, TN); University of Tennessee Research Corporation (Knoxville, TN)
Patent Number(s):
US 6167748
OSTI ID:
873469
Country of Publication:
United States
Language:
English

References (9)

Photothermal spectroscopy with femtojoule sensitivity using a micromechanical device journal November 1994
Sensing Discrete Streptavidin-Biotin Interactions with Atomic Force Microscopy journal February 1994
A capacitive pressure sensor with low impedance output and active suppression of parasitic effects journal February 1990
A nondestructive method for determining the spring constant of cantilevers for scanning force microscopy journal February 1993
Measuring intermolecular binding forces with the Atomic-Force Microscope: The magnetic jump method journal January 1994
A novel readout technique for capacitive gas sensors journal January 1990
Observation of a chemical reaction using a micromechanical sensor journal January 1994
Microfabrication of cantilever styli for the atomic force microscope
  • Albrecht, T. R.; Akamine, S.; Carver, T. E.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 8, Issue 4 https://doi.org/10.1116/1.576520
journal July 1990
A mechanical nanosensor in the gigahertz range: where mechanics meets electronics journal January 1994

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Related Subjects

/73/204/422/435/436/
achieves
adjacent
affinity
apart
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biological
cancellation
cantilever
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substantially
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variation
varies