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Title: Capacitively readout multi-element sensor array with common-mode cancellation

Patent ·
OSTI ID:873469
 [1];  [1];  [2];  [1];  [1]
  1. Knoxville, TN
  2. Decatur, TN
+ Show Author Affiliations

An improved multi-element apparatus for detecting the presence of at least one chemical, biological or physical component in a monitored area comprising an array or single set of the following elements: a capacitive transducer having at least one cantilever spring element secured thereto, the cantilever element having an area thereof coated with a chemical having an affinity for the component to be detected; a pick-up plate positioned adjacent to the cantilever element at a distance such that a capacitance between the cantilever element and the pick-up plate changes as the distance between the cantilever element and the pick-up plate varies, the change in capacitance being a measurable variation; a detection means for measuring the measurable variation in the capacitance between the cantilever element and the pick-up plate that forms a measurement channel signal; and at least one feedback cantilever spring element positioned apart from the coated cantilever element, the cantilever element substantially unaffected by the component being monitored and providing a reference channel signal to the detection means that achieves a common mode cancellation between the measurement channel signal and reference channel signal.

Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
DOE Contract Number:
AC05-96OR22464
Assignee:
Lockheed Martin Energy Research Corporation (Oak Ridge, TN); University of Tennessee Research Corporation (Knoxville, TN)
Patent Number(s):
US 6167748
OSTI ID:
873469
Country of Publication:
United States
Language:
English

References (9)

Microfabrication of cantilever styli for the atomic force microscope
  • Albrecht, T. R.; Akamine, S.; Carver, T. E.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 8, Issue 4 https://doi.org/10.1116/1.576520
journal July 1990
A capacitive pressure sensor with low impedance output and active suppression of parasitic effects journal February 1990
Measuring intermolecular binding forces with the Atomic-Force Microscope: The magnetic jump method journal January 1994
Photothermal spectroscopy with femtojoule sensitivity using a micromechanical device journal November 1994
Sensing Discrete Streptavidin-Biotin Interactions with Atomic Force Microscopy journal February 1994
A nondestructive method for determining the spring constant of cantilevers for scanning force microscopy journal February 1993
A mechanical nanosensor in the gigahertz range: where mechanics meets electronics journal January 1994
Observation of a chemical reaction using a micromechanical sensor journal January 1994
A novel readout technique for capacitive gas sensors journal January 1990

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capacitively
readout
multi-element
sensor
array
common-mode
cancellation
improved
apparatus
detecting
presence
chemical
biological
physical
component
monitored
comprising
single
set
following
elements
capacitive
transducer
cantilever
spring
element
secured
thereto
coated
affinity
detected
pick-up
plate
positioned
adjacent
distance
capacitance
changes
varies
change
measurable
variation
detection
means
measuring
forms
measurement
channel
signal
feedback
apart
substantially
unaffected
providing
reference
achieves
common
mode
common mode
sensor array
detection means
spring element
positioned adjacent
secured thereto
single set
capacitive transducer
channel signal
plate positioned
element positioned
cantilever spring
/73/204/422/435/436/