Low work function, stable thin films
Patent
·
OSTI ID:873453
- Concord, CA
- Berkeley, CA
- Livermore, CA
Generation of low work function, stable compound thin films by laser ablation. Compound thin films with low work function can be synthesized by simultaneously laser ablating silicon, for example, and thermal evaporating an alkali metal into an oxygen environment. For example, the compound thin film may be composed of Si/Cs/O. The work functions of the thin films can be varied by changing the silicon/alkali metal/oxygen ratio. Low work functions of the compound thin films deposited on silicon substrates were confirmed by ultraviolet photoelectron spectroscopy (UPS). The compound thin films are stable up to 500.degree. C. as measured by x-ray photoelectron spectroscopy (XPS). Tests have established that for certain chemical compositions and annealing temperatures of the compound thin films, negative electron affinity (NEA) was detected. The low work function, stable compound thin films can be utilized in solar cells, field emission flat panel displays, electron guns, and cold cathode electron guns.
- Research Organization:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Number(s):
- US 6162707
- OSTI ID:
- 873453
- Country of Publication:
- United States
- Language:
- English
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ablating
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alkali
alkali metal
annealing
annealing temperature
annealing temperatures
cathode
cathode electron
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changing
chemical
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silicon
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simultaneously
simultaneously laser
solar
solar cell
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spectroscopy
stable
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thermal
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ultraviolet
utilized
varied
x-ray
x-ray photoelectron
xps
500
ablating
ablating silicon
ablation
affinity
alkali
alkali metal
annealing
annealing temperature
annealing temperatures
cathode
cathode electron
cells
changing
chemical
chemical composition
chemical compositions
cold
cold cathode
composed
compositions
compound
confirmed
cs
degree
deposited
detected
displays
electron
electron affinity
electron gun
electron spectroscopy
emission
emission flat
environment
established
evaporating
example
field
field emission
film
films
films deposited
flat
flat panel
function
functions
generation
guns
laser
laser ablating
laser ablation
measured
metal
nea
negative
negative electron
oxygen
oxygen environment
oxygen ratio
panel
panel display
panel displays
photoelectron
ratio
silicon
silicon substrate
silicon substrates
simultaneously
simultaneously laser
solar
solar cell
solar cells
spectroscopy
stable
stable compound
substrates
synthesized
temperatures
tests
thermal
thermal evaporating
ultraviolet
utilized
varied
x-ray
x-ray photoelectron
xps