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Memory device using movement of protons

Patent ·
OSTI ID:873441
 [1];  [2];  [3];  [4];  [5];  [6];  [7]
  1. 900 N. Randolph St., Arlington, VA 22203
  2. 8401 Spain Rd., Albuquerque, NM 87111
  3. 5513 Estrellita del Norte, NE., Albuquerque, NM 87111
  4. 12 Impasse de la Liberation, 38950 St. Martin le Vinoux, FR
  5. 3108 Vicky Ct., Garland, TX 75044
  6. 1512 Ridgeview Dr., Arlington, TX 76012-1940
  7. 428 Park Bend Dr., Richardson, TX 75081
+ Show Author Affiliations

An enhancement of an electrically written memory element utilizing the motion of protons within a dielectric layer surrounded by layers on either side to confine the protons within the dielectric layer with electrode means attached to the surrounding layers to change the spatial position of the protons within the dielectric layer. The device is preferably constructed as a silicon-silicon dioxide-silicon layered structure with the protons being introduced to the structure during an anneal in an atmosphere containing hydrogen gas. Device operation is enhanced by concluding this anneal step with a sudden cooling. The device operates at low power, is preferably nonvolatile, is radiation tolerant, and is compatible with convention silicon MOS processing for integration with other microelectronics elements on the same silicon substrate.

Research Organization:
SANDIA CORP
DOE Contract Number:
AC04-94AL85000
Assignee:
Warren, William L. (900 N. Randolph St., Arlington, VA 22203);Vanheusden, Karel J. R. (8401 Spain Rd., Albuquerque, NM 87111);Fleetwood, Daniel M. (5513 Estrellita del Norte, NE., Albuquerque, NM 87111);Devine, Roderick A. B. (12 Impasse de la Liberation, 38950 St. Martin le Vinoux, FR);Archer, Leo B. (3108 Vicky Ct., Garland, TX 75044);Brown, George A. (1512 Ridgeview Dr., Arlington, TX 76012-1940);Wallace, Robert M. (428 Park Bend Dr., Richardson, TX 75081)
Patent Number(s):
US 6159829
OSTI ID:
873441
Country of Publication:
United States
Language:
English

References (1)

Non-volatile memory device based on mobile protons in SiO2 thin films journal April 1997

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