Method and apparatus for improved wire saw slurry

Patent · Tue Sep 05 00:00:00 EDT 2000

OSTI ID:873210

Costantini, Michael A ^[1]; Talbott, Jonathan A ^[2]; Chandra, Mohan ^[3]; Prasad, Vishwanath ^[4]; Caster, Allison ^[5]; Gupta, Kedar P ^[3]; Leyvraz, Philippe ^[5]

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1. Hudson, NH
2. Amherst, NH
3. Merrimack, NH
4. East Setauket, NY
5. Nashua, NH

A slurry recycle process for use in free-abrasive machining operations such as for wire saws used in wafer slicing of ingots, where the used slurry is separated into kerf-rich and abrasive-rich components, and the abrasive-rich component is reconstituted into a makeup slurry. During the process, the average particle size of the makeup slurry is controlled by monitoring the condition of the kerf and abrasive components and making necessary adjustments to the separating force and dwell time of the separator apparatus. Related pre-separator and post separator treatments, and feedback of one or the other separator slurry output components for mixing with incoming used slurry and recirculation through the separator, provide further effectiveness and additional control points in the process. The kerf-rich component is eventually or continually removed; the abrasive-rich component is reconstituted into a makeup slurry with a controlled, average particle size such that the products of the free-abrasive machining method using the recycled slurry process of the invention are of consistent high quality with less TTV deviation from cycle to cycle for a prolonged period or series of machining operations.

• Research Organization: G.T. Equipment Technologies Inc. (Nashua, NH)
• DOE Contract Number: FG02-95ER81978
• Assignee: G.T. Equipment Technologies Inc. (Nashua, NH)
• Patent Number(s): US 6113473
• Application Number: 09/065769
• OSTI ID: 873210
• Country of Publication: United States
• Language: English

Related Subjects

method
apparatus
improved
wire
slurry
recycle
process
free-abrasive
machining
operations
saws
wafer
slicing
ingots
separated
kerf-rich
abrasive-rich
components
component
reconstituted
makeup
average
particle
size
controlled
monitoring
condition
kerf
abrasive
adjustments
separating
force
dwell
time
separator
related
pre-separator
post
treatments
feedback
output
mixing
incoming
recirculation
provide
effectiveness
additional
control
eventually
continually
removed
products
recycled
consistent
quality
ttv
deviation
cycle
prolonged
period
series
machining operations
dwell time
slurry process
particle size
machining operation
average particle
separator apparatus
prolonged period
additional control
machining method
/451/125/