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Title: Compton backscattered collmated X-ray source

Abstract

A high-intensity, inexpensive and collimated x-ray source for applications such as x-ray lithography is disclosed. An intense pulse from a high power laser, stored in a high-finesse resonator, repetitively collides nearly head-on with and Compton backscatters off a bunched electron beam, having relatively low energy and circulating in a compact storage ring. Both the laser and the electron beams are tightly focused and matched at the interaction region inside the optical resonator. The laser-electron interaction not only gives rise to x-rays at the desired wavelength, but also cools and stabilizes the electrons against intrabeam scattering and Coulomb repulsion with each other in the storage ring. This cooling provides a compact, intense bunch of electrons suitable for many applications. In particular, a sufficient amount of x-rays can be generated by this device to make it an excellent and flexible Compton backscattered x-ray (CBX) source for high throughput x-ray lithography and many other applications.

Inventors:
 [1];  [2]
  1. (Woodside, CA)
  2. (Stanford, CA)
Publication Date:
Research Org.:
Stanford Linear Accelerator Center (SLAC), Menlo Park, CA
OSTI Identifier:
872897
Patent Number(s):
US 6035015
Assignee:
Board of Trustees of Leland Stanford Junior University (Palo Alto, CA) SLAC
DOE Contract Number:  
AC03-76SF00515
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
compton; backscattered; collmated; x-ray; source; high-intensity; inexpensive; collimated; applications; lithography; disclosed; intense; pulse; power; laser; stored; high-finesse; resonator; repetitively; collides; nearly; head-on; backscatters; bunched; electron; beam; relatively; energy; circulating; compact; storage; beams; tightly; focused; matched; interaction; region; inside; optical; laser-electron; rise; x-rays; desired; wavelength; cools; stabilizes; electrons; intrabeam; scattering; coulomb; repulsion; cooling; provides; bunch; suitable; particular; sufficient; amount; generated; device; excellent; flexible; cbx; throughput; compton backscattered; desired wavelength; x-ray lithography; sufficient amount; x-ray source; electron beam; electron beams; power laser; region inside; bunched electron; collimated x-ray; scattered x-ray; coulomb repulsion; interaction region; high-finesse resonator; intense pulse; desired wave; /378/

Citation Formats

Ruth, Ronald D., and Huang, Zhirong. Compton backscattered collmated X-ray source. United States: N. p., 2000. Web.
Ruth, Ronald D., & Huang, Zhirong. Compton backscattered collmated X-ray source. United States.
Ruth, Ronald D., and Huang, Zhirong. Sat . "Compton backscattered collmated X-ray source". United States. doi:. https://www.osti.gov/servlets/purl/872897.
@article{osti_872897,
title = {Compton backscattered collmated X-ray source},
author = {Ruth, Ronald D. and Huang, Zhirong},
abstractNote = {A high-intensity, inexpensive and collimated x-ray source for applications such as x-ray lithography is disclosed. An intense pulse from a high power laser, stored in a high-finesse resonator, repetitively collides nearly head-on with and Compton backscatters off a bunched electron beam, having relatively low energy and circulating in a compact storage ring. Both the laser and the electron beams are tightly focused and matched at the interaction region inside the optical resonator. The laser-electron interaction not only gives rise to x-rays at the desired wavelength, but also cools and stabilizes the electrons against intrabeam scattering and Coulomb repulsion with each other in the storage ring. This cooling provides a compact, intense bunch of electrons suitable for many applications. In particular, a sufficient amount of x-rays can be generated by this device to make it an excellent and flexible Compton backscattered x-ray (CBX) source for high throughput x-ray lithography and many other applications.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Jan 01 00:00:00 EST 2000},
month = {Sat Jan 01 00:00:00 EST 2000}
}

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