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Title: Compton backscattered collmated X-ray source

Patent ·
OSTI ID:872897
 [1];  [2]
  1. Woodside, CA
  2. Stanford, CA
+ Show Author Affiliations

A high-intensity, inexpensive and collimated x-ray source for applications such as x-ray lithography is disclosed. An intense pulse from a high power laser, stored in a high-finesse resonator, repetitively collides nearly head-on with and Compton backscatters off a bunched electron beam, having relatively low energy and circulating in a compact storage ring. Both the laser and the electron beams are tightly focused and matched at the interaction region inside the optical resonator. The laser-electron interaction not only gives rise to x-rays at the desired wavelength, but also cools and stabilizes the electrons against intrabeam scattering and Coulomb repulsion with each other in the storage ring. This cooling provides a compact, intense bunch of electrons suitable for many applications. In particular, a sufficient amount of x-rays can be generated by this device to make it an excellent and flexible Compton backscattered x-ray (CBX) source for high throughput x-ray lithography and many other applications.

Research Organization:
SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)
DOE Contract Number:
AC03-76SF00515
Assignee:
Board of Trustees of Leland Stanford Junior University (Palo Alto, CA)
Patent Number(s):
US 6035015
OSTI ID:
872897
Country of Publication:
United States
Language:
English

References (9)

A proposal for the generation of ultra-short X-ray pulses
  • Zholents, Alexander A.; Zolotorev, Max S.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 358, Issue 1-3 https://doi.org/10.1016/0168-9002(94)01284-9
journal April 1995
Prospects for compact high-intensity laser synchrotron x-ray and gamma sources conference January 1997
Tunable, short pulse hard x‐rays from a compact laser synchrotron source journal December 1992
New x‐ray source for lithography journal December 1989
Laser Cooling of Electron Beams for Linear Colliders journal June 1997
Development of a compact high brightness X-ray source
  • Chen, J.; Imasaki, K.; Fujita, M.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 341, Issue 1-3 https://doi.org/10.1016/0168-9002(94)90379-4
journal March 1994
Laser-Electron Storage Ring journal February 1998
Emerging terawatt picosecond CO/sub 2/ laser technology and possible applications in accelerator physics conference January 1998
Applications of Short Bunches conference January 1996

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Related Subjects

compton
backscattered
collmated
x-ray
source
high-intensity
inexpensive
collimated
applications
lithography
disclosed
intense
pulse
power
laser
stored
high-finesse
resonator
repetitively
collides
nearly
head-on
backscatters
bunched
electron
beam
relatively
energy
circulating
compact
storage
beams
tightly
focused
matched
interaction
region
inside
optical
laser-electron
rise
x-rays
desired
wavelength
cools
stabilizes
electrons
intrabeam
scattering
coulomb
repulsion
cooling
provides
bunch
suitable
particular
sufficient
amount
generated
device
excellent
flexible
cbx
throughput
compton backscattered
desired wavelength
x-ray lithography
sufficient amount
x-ray source
electron beam
electron beams
power laser
region inside
bunched electron
collimated x-ray
scattered x-ray
coulomb repulsion
interaction region
high-finesse resonator
intense pulse
desired wave
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