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Compton backscattered collimated x-ray source

Patent ·
OSTI ID:871925
 [1];  [2]
  1. Woodside, CA
  2. Stanford, CA
+ Show Author Affiliations

A high-intensity, inexpensive and collimated x-ray source for applications such as x-ray lithography is disclosed. An intense pulse from a high power laser, stored in a high-finesse resonator, repetitively collides nearly head-on with and Compton backscatters off a bunched electron beam, having relatively low energy and circulating in a compact storage ring. Both the laser and the electron beams are tightly focused and matched at the interaction region inside the optical resonator. The laser-electron interaction not only gives rise to x-rays at the desired wavelength, but also cools and stabilizes the electrons against intrabeam scattering and Coulomb repulsion with each other in the storage ring. This cooling provides a compact, intense bunch of electrons suitable for many applications. In particular, a sufficient amount of x-rays can be generated by this device to make it an excellent and flexible Compton backscattered x-ray (CBX) source for high throughput x-ray lithography and many other applications.

Research Organization:
Stanford Linear Accelerator Center (SLAC), Menlo Park, CA
DOE Contract Number:
AC03-76SF00515
Assignee:
Board of Trustees of Leland Stanford Junior University (Palo Alto, CA)
Patent Number(s):
US 5825847
OSTI ID:
871925
Country of Publication:
United States
Language:
English

References (5)

Tunable, short pulse hard x‐rays from a compact laser synchrotron source journal December 1992
New x‐ray source for lithography journal December 1989
Laser Cooling of Electron Beams for Linear Colliders journal June 1997
Development of a compact high brightness X-ray source
  • Chen, J.; Imasaki, K.; Fujita, M.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 341, Issue 1-3 https://doi.org/10.1016/0168-9002(94)90379-4
journal March 1994
Emerging terawatt picosecond CO/sub 2/ laser technology and possible applications in accelerator physics conference January 1998

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Related Subjects

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