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Title: Method of fabrication of display pixels driven by silicon thin film transistors

Abstract

Display pixels driven by silicon thin film transistors are fabricated on plastic substrates for use in active matrix displays, such as flat panel displays. The process for forming the pixels involves a prior method for forming individual silicon thin film transistors on low-temperature plastic substrates. Low-temperature substrates are generally considered as being incapable of withstanding sustained processing temperatures greater than about 200.degree. C. The pixel formation process results in a complete pixel and active matrix pixel array. A pixel (or picture element) in an active matrix display consists of a silicon thin film transistor (TFT) and a large electrode, which may control a liquid crystal light valve, an emissive material (such as a light emitting diode or LED), or some other light emitting or attenuating material. The pixels can be connected in arrays wherein rows of pixels contain common gate electrodes and columns of pixels contain common drain electrodes. The source electrode of each pixel TFT is connected to its pixel electrode, and is electrically isolated from every other circuit element in the pixel array.

Inventors:
 [1];  [2]
  1. Mountain View, CA
  2. San Ramon, CA
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
872709
Patent Number(s):
US 5994174
Assignee:
Regents of University of California (Oakland, CA)
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; fabrication; display; pixels; driven; silicon; film; transistors; fabricated; plastic; substrates; active; matrix; displays; flat; panel; process; forming; involves; prior; individual; low-temperature; considered; incapable; withstanding; sustained; processing; temperatures; 200; degree; pixel; formation; results; complete; array; picture; element; consists; transistor; tft; electrode; control; liquid; crystal; light; valve; emissive; material; emitting; diode; led; attenuating; connected; arrays; rows; contain; common; gate; electrodes; columns; drain; source; electrically; isolated; circuit; emitting diode; plastic substrate; process results; active matrix; film transistors; electrically isolated; liquid crystal; light emitting; flat panel; processing temperatures; pixel array; panel displays; panel display; circuit element; plastic substrates; electrically isolate; processing temperature; temperature plastic; formation process; emissive material; film transistor; pixels driven; display pixels; matrix display; low-temperature plastic; light valve; /438/257/345/

Citation Formats

Carey, Paul G, and Smith, Patrick M. Method of fabrication of display pixels driven by silicon thin film transistors. United States: N. p., 1999. Web.
Carey, Paul G, & Smith, Patrick M. Method of fabrication of display pixels driven by silicon thin film transistors. United States.
Carey, Paul G, and Smith, Patrick M. Fri . "Method of fabrication of display pixels driven by silicon thin film transistors". United States. https://www.osti.gov/servlets/purl/872709.
@article{osti_872709,
title = {Method of fabrication of display pixels driven by silicon thin film transistors},
author = {Carey, Paul G and Smith, Patrick M},
abstractNote = {Display pixels driven by silicon thin film transistors are fabricated on plastic substrates for use in active matrix displays, such as flat panel displays. The process for forming the pixels involves a prior method for forming individual silicon thin film transistors on low-temperature plastic substrates. Low-temperature substrates are generally considered as being incapable of withstanding sustained processing temperatures greater than about 200.degree. C. The pixel formation process results in a complete pixel and active matrix pixel array. A pixel (or picture element) in an active matrix display consists of a silicon thin film transistor (TFT) and a large electrode, which may control a liquid crystal light valve, an emissive material (such as a light emitting diode or LED), or some other light emitting or attenuating material. The pixels can be connected in arrays wherein rows of pixels contain common gate electrodes and columns of pixels contain common drain electrodes. The source electrode of each pixel TFT is connected to its pixel electrode, and is electrically isolated from every other circuit element in the pixel array.},
doi = {},
url = {https://www.osti.gov/biblio/872709}, journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {1}
}

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