Two modulator generalized ellipsometer for complete mueller matrix measurement

Patent · Thu Dec 31 23:00:00 EST 1998

OSTI ID:872530

Modine, Frank A ^[1]

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1. Oak Ridge, TN

A two-modulator generalized ellipsometer (2-MGE) comprising two polarizer-photoelastic modulator (PEM) pairs, an optical light source, an optical detection system, and associated data processing and control electronics, where the PEMs are free-running. The input light passes through the first polarizer-PEM pair, reflects off the sample surface or passes through the sample, passes through the second PEM-polarizer pair, and is detected. Each PEM is free running and operates at a different resonant frequency, e.g., 50 and 60 kHz. The resulting time-dependent waveform of the light intensity is a complicated function of time, and depends upon the exact operating frequency and phase of each PEM, the sample, and the azimuthal angles of the polarizer-PEM pairs, but can be resolved into a dc component and eight periodic components. In one embodiment, the waveform is analyzed using a new spectral analysis technique that is similar to Fourier analysis to determine eight sample Mueller matrix elements (normalized to the m.sub.00 Mueller matrix element). The other seven normalized elements of the general 4.times.4 Mueller matrix can be determined by changing the azimuthal angles of the PEM-polarizer pairs with respect to the plane of incidence. Since this instrument can measure all elements of the sample Mueller matrix, it is much more powerful than standard ellipsometers.

• Research Organization: LOCKHEED MARTIN ENERGY RES COR
• DOE Contract Number: AC05-96OR22464
• Assignee: Lockheed Martin Energy Research Corporation ()
• Patent Number(s): US 5956147
• OSTI ID: 872530
• Country of Publication: United States
• Language: English

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