Two-modulator generalized ellipsometry: theory
- Solid State Division, Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, Tennessee 37831-6056 (United States)
A new ellipsometer is described that uses two photoelastic modulator-polarizer pairs, where the photoelastic modulators are operating at differing resonant frequencies. The time-dependent intensity of the light beam is extremely complicated but can be analyzed so that all elements of the sample Mueller matrix are obtained. For a given configuration, nine of the Mueller matrix elements can be measured at any one time; the other seven elements are accessible when the azimuthal angles of the photoelastic modulators are changed. The single-configuration measurement is often sufficient to characterize a number of real situations completely, such as film growth in a vacuum environment, anisotropic samples, and simple depolarization. {copyright} 1997 Optical Society of America
- Research Organization:
- Oak Ridge National Laboratory
- DOE Contract Number:
- AC05-96OR22464
- OSTI ID:
- 664604
- Journal Information:
- Applied Optics, Journal Name: Applied Optics Journal Issue: 31 Vol. 36; ISSN 0003-6935; ISSN APOPAI
- Country of Publication:
- United States
- Language:
- English
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