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Plasma mixing glow discharge device for analytical applications

Patent ·
OSTI ID:872258
 [1]
  1. Knoxville, TN
+ Show Author Affiliations

An instrument for analyzing a sample has an enclosure that forms a chamber containing an anode which divides the chamber into a discharge region and an analysis region. A gas inlet and outlet are provided to introduce and exhaust a rare gas into the discharge region. A cathode within the discharge region has a plurality of pins projecting in a geometric pattern toward the anode for exciting the gas and producing a plasma discharge between the cathode and the anode. Low energy electrons (e.g. <0.5 eV) pass into the analysis region through an aperture. The sample to be analyzed is placed into the analysis region and bombarded by the metastable rare gas atoms and the low energy electrons extracted into from the discharge region. A mass or optical spectrometer can be coupled to a port of the analysis region to analyze the resulting ions and light emission.

Research Organization:
LOCKHEED MARTIN ENERGY RES COR
DOE Contract Number:
AC05-96OR22464
Assignee:
Lockheed Martin Energy Research Corporation (Oak Ridge, TN)
Patent Number(s):
US 5896196
OSTI ID:
872258
Country of Publication:
United States
Language:
English

References (3)

Enhanced methyl‐radical production in an Ar‐CH 4 pin‐hollow cathode discharge journal April 1994
Electron‐temperature control by movable pins installed in a hollow cathode for discharge plasmas journal February 1993
Effect of electron temperature on negative hydrogen ion production in a low‐pressure Ar discharge plasma with methane journal September 1993

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Related Subjects

/356/250/
analysis
analysis region
analytical
analytical applications
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