Plasma mixing glow discharge device for analytical applications
An instrument for analyzing a sample has an enclosure that forms a chamber containing an anode which divides the chamber into a discharge region and an analysis region. A gas inlet and outlet are provided to introduce and exhaust a rare gas into the discharge region. A cathode within the discharge region has a plurality of pins projecting in a geometric pattern toward the anode for exciting the gas and producing a plasma discharge between the cathode and the anode. Low energy electrons (e.g. <0.5 eV) pass into the analysis region through an aperture. The sample to be analyzed is placed into the analysis region and bombarded by the metastable rare gas atoms and the low energy electrons extracted into from the discharge region. A mass or optical spectrometer can be coupled to a port of the analysis region to analyze the resulting ions and light emission. 3 figs.
- Research Organization:
- Lockheed Martin Energy Research Corporation
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC05-96OR22464
- Assignee:
- Lockheed Martin Energy Research Corp., Oak Ridge, TN (United States)
- Patent Number(s):
- US 5,896,196/A/
- Application Number:
- PAN: 8-912,907
- OSTI ID:
- 350317
- Country of Publication:
- United States
- Language:
- English
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