Method of growing films by flame synthesis using a stagnation-flow reactor
Patent
·
OSTI ID:871989
- Dublin, CA
- Sunnyvale, CA
A method of stabilizing a strained flame in a stagnation flow reactor. By causing a highly strained flame to be divided into a large number of equal size segments it is possible to stablize a highly strained flame that is on the verge of extinction, thereby providing for higher film growth rates. The flame stabilizer is an annular ring mounted coaxially and coplanar with the substrate upon which the film is growing and having a number of vertical pillars mounted on the top surface, thereby increasing the number of azimuthal nodes into which the flame is divided and preserving an axisymmetric structure necessary for stability.
- Research Organization:
- SANDIA CORP
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Livermore, CA)
- Patent Number(s):
- US 5840373
- OSTI ID:
- 871989
- Country of Publication:
- United States
- Language:
- English
Large‐area diamond deposition in an atmospheric pressure stagnation‐flow reactor
|
journal | April 1996 |
Scaleable stagnation‐flow reactors for uniform materials deposition: Application to combustion synthesis of diamond
|
journal | September 1993 |
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/427/
annular
axisymmetric
azimuthal
causing
coaxially
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divided
equal
equal size
extinction
film
film growth
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flame
flame stabilizer
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flow
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growing
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highly
highly strained
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mounted
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providing
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stability
stabilizer
stabilizing
stablize
stagnation
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stagnation-flow
strained
strained flame
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substrate
surface
synthesis
top
top surface
verge
vertical
annular
axisymmetric
azimuthal
causing
coaxially
coplanar
divided
equal
equal size
extinction
film
film growth
films
flame
flame stabilizer
flame synthesis
flow
flow reactor
growing
growing films
growth
growth rate
growth rates
highly
highly strained
increasing
method
mounted
mounted coaxial
nodes
pillars
preserving
providing
rates
reactor
segments
size
size segments
stability
stabilizer
stabilizing
stablize
stagnation
stagnation flow
stagnation-flow
strained
strained flame
structure
substrate
surface
synthesis
top
top surface
verge
vertical