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Title: Method of growing films by flame synthesis using a stagnation-flow reactor

Patent ·
OSTI ID:871989

A method of stabilizing a strained flame in a stagnation flow reactor. By causing a highly strained flame to be divided into a large number of equal size segments it is possible to stablize a highly strained flame that is on the verge of extinction, thereby providing for higher film growth rates. The flame stabilizer is an annular ring mounted coaxially and coplanar with the substrate upon which the film is growing and having a number of vertical pillars mounted on the top surface, thereby increasing the number of azimuthal nodes into which the flame is divided and preserving an axisymmetric structure necessary for stability.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Livermore, CA)
Patent Number(s):
US 5840373
OSTI ID:
871989
Country of Publication:
United States
Language:
English

References (2)

Large‐area diamond deposition in an atmospheric pressure stagnation‐flow reactor journal April 1996
Scaleable stagnation‐flow reactors for uniform materials deposition: Application to combustion synthesis of diamond journal September 1993