Method for localized deposition of noble metal catalysts with control of morphology

Patent · Thu Jan 01 00:00:00 EST 1998

OSTI ID:871890

Ricco, Antonio J ^[1]; Manginell, Ronald P ^[1]; Huber, Robert J ^[2]

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1. Albuquerque, NM
2. Bountiful, UT

A combustible gas sensor that uses a resistively heated, noble metal-coated, micromachined polycrystalline Si filament to calorimetrically detect the presence and concentration of combustible gases. A thin catalytic Pt film was deposited by CVD from the precursor Pt(acac).sub.2 onto microfilaments resistively heated to approximately 500 .degree. C.; Pt deposits only on the hot filament. The filaments tested to date are 2 .mu.m thick .times.10 .mu.m wide .times.100, 250, 500, or 1000 .mu.m-long polycrystalline Si; some are overcoated with a 0.25 .mu.m-thick protective CVD Si.sub.3 N.sub.4 layer.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 5820922
• OSTI ID: 871890
• Country of Publication: United States
• Language: English

Related Subjects

method
localized
deposition
noble
metal
catalysts
control
morphology
combustible
gas
sensor
resistively
heated
metal-coated
micromachined
polycrystalline
filament
calorimetrically
detect
presence
concentration
gases
catalytic
film
deposited
cvd
precursor
acac
microfilaments
approximately
500
degree
deposits
hot
filaments
tested
date
thick
times
10
wide
100
250
1000
m-long
overcoated
25
m-thick
protective
layer
combustible gases
metal catalysts
noble metal
combustible gas
metal catalyst
gas sensor
hot filament
resistively heated
noble metal-coated
micromachined polycrystalline
filaments tested
calorimetrically detect
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