Method for localized deposition of noble metal catalysts with control of morphology

Patent · Wed Dec 31 23:00:00 EST 1997

OSTI ID:871890

Ricco, Antonio J ^[1]; Manginell, Ronald P ^[1]; Huber, Robert J ^[2]

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1. Albuquerque, NM
2. Bountiful, UT

A combustible gas sensor that uses a resistively heated, noble metal-coated, micromachined polycrystalline Si filament to calorimetrically detect the presence and concentration of combustible gases. A thin catalytic Pt film was deposited by CVD from the precursor Pt(acac).sub.2 onto microfilaments resistively heated to approximately 500 .degree. C.; Pt deposits only on the hot filament. The filaments tested to date are 2 .mu.m thick .times.10 .mu.m wide .times.100, 250, 500, or 1000 .mu.m-long polycrystalline Si; some are overcoated with a 0.25 .mu.m-thick protective CVD Si.sub.3 N.sub.4 layer.

• Research Organization: SANDIA CORP
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 5820922
• OSTI ID: 871890
• Country of Publication: United States
• Language: English

Related Subjects

/427/
10
100
1000
25
250
500
acac
approximately
calorimetrically
calorimetrically detect
catalysts
catalytic
combustible
combustible gas
combustible gases
concentration
control
cvd
date
degree
deposited
deposition
deposits
detect
filament
filaments
filaments tested
film
gas
gas sensor
gases
heated
hot
hot filament
layer
localized
m-long
m-thick
metal
metal catalyst
metal catalysts
metal-coated
method
microfilaments
micromachined
micromachined polycrystalline
morphology
noble
noble metal
noble metal-coated
overcoated
polycrystalline
precursor
presence
protective
resistively
resistively heated
sensor
tested
thick
times
wide