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Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent

Patent ·
OSTI ID:871788
 [1];  [2];  [3]
  1. Los Lunas, NM
  2. Albuquerque, NM
  3. Cedar Crest, NM
+ Show Author Affiliations

The acoustic-wave sensor. The acoustic-wave sensor is designed for ambient or vapor-phase monitoring of a photoresist-stripping agent such as N-methylpyrrolidinone (NMP), ethoxyethylpropionate (EEP) or the like. The acoustic-wave sensor comprises an acoustic-wave device such as a surface-acoustic-wave (SAW) device, a flexural-plate-wave (FPW) device, an acoustic-plate-mode (APM) device, or a thickness-shear-mode (TSM) device (also termed a quartz crystal microbalance or QCM) having a sensing region on a surface thereof. The sensing region includes a sensing film for sorbing a quantity of the photoresist-stripping agent, thereby altering or shifting a frequency of oscillation of an acoustic wave propagating through the sensing region for indicating an ambient concentration of the agent. According to preferred embodiments of the invention, the acoustic-wave device is a SAW device; and the sensing film comprises poly(vinylacetate), poly(N-vinylpyrrolidinone), or poly(vinylphenol).

Research Organization:
SANDIA CORP
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
US 5795993
OSTI ID:
871788
Country of Publication:
United States
Language:
English

References (3)

Solubility interactions and the design of chemically selective sorbent coatings for chemical sensors and arrays journal February 1991
Characterization of polymeric surface acoustic wave sensor coatings and semiempirical models of sensor responses to organic vapors journal August 1993
Polymer-coated surface acoustic wave monitoring of CCl4 in a steam reforming reactor journal October 1994

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Related Subjects

/73/
according
acoustic
acoustic wave
acoustic-plate-mode
acoustic-wave
acoustic-wave device
acoustic-wave sensor
agent
altering
ambient
apm
comprises
comprises poly
concentration
crystal
crystal microbalance
designed
device
embodiments
ethoxyethylpropionate
film
film comprises
flexural-plate-wave
fpw
frequency
indicating
microbalance
monitoring
n-methylpyrrolidinone
n-vinylpyrrolidinone
nmp
oscillation
phase monitor
photoresist-stripping
photoresist-stripping agent
poly
preferred
preferred embodiment
preferred embodiments
propagating
qcm
quantity
quartz
quartz crystal
region
sensing
sensing film
sensor
sensor comprises
shifting
sorbing
surface
surface-acoustic-wave
termed
thickness-shear-mode
tsm
vapor-phase
vinylacetate
vinylphenol
wave
wave device
wave sensor