Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent
- Los Lunas, NM
- Albuquerque, NM
- Cedar Crest, NM
The acoustic-wave sensor. The acoustic-wave sensor is designed for ambient or vapor-phase monitoring of a photoresist-stripping agent such as N-methylpyrrolidinone (NMP), ethoxyethylpropionate (EEP) or the like. The acoustic-wave sensor comprises an acoustic-wave device such as a surface-acoustic-wave (SAW) device, a flexural-plate-wave (FPW) device, an acoustic-plate-mode (APM) device, or a thickness-shear-mode (TSM) device (also termed a quartz crystal microbalance or QCM) having a sensing region on a surface thereof. The sensing region includes a sensing film for sorbing a quantity of the photoresist-stripping agent, thereby altering or shifting a frequency of oscillation of an acoustic wave propagating through the sensing region for indicating an ambient concentration of the agent. According to preferred embodiments of the invention, the acoustic-wave device is a SAW device; and the sensing film comprises poly(vinylacetate), poly(N-vinylpyrrolidinone), or poly(vinylphenol).
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- US 5795993
- OSTI ID:
- 871788
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
sensor
ambient
monitoring
photoresist-stripping
agent
designed
vapor-phase
n-methylpyrrolidinone
nmp
ethoxyethylpropionate
comprises
device
surface-acoustic-wave
flexural-plate-wave
fpw
acoustic-plate-mode
apm
thickness-shear-mode
tsm
termed
quartz
crystal
microbalance
qcm
sensing
region
surface
film
sorbing
quantity
altering
shifting
frequency
oscillation
acoustic
wave
propagating
indicating
concentration
according
preferred
embodiments
poly
vinylacetate
n-vinylpyrrolidinone
vinylphenol
acoustic-wave device
preferred embodiments
acoustic wave
preferred embodiment
quartz crystal
sensor comprises
acoustic-wave sensor
film comprises
wave device
sensing film
photoresist-stripping agent
crystal microbalance
phase monitor
comprises poly
wave sensor
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