Acoustic wave microsensors - Part I
- Pacific Northwest Lab., Richland, WA (United States)
- Sandia National Lab., Albuquerque, NM (United States)
- Univ. of California, Berkeley, CA (United States)
Acoustic wave microsensors are being used for broader applications in chemical sensing and interfacial studies as more devices are invented and new sensor response mechanisms are elucidated. This report compares and contrasts the more commonly used acoustic wave devices and provide a current description of the physical origins of observed sensor responses in both gas- and liquid-phase studies. The types of waves and devices as well as information on operation and measurement methods, mass sensitivity, and detection are discussed. We focus primarily on thickness-shear mode (TSM), surface acoustic wave (SAW), flexural plate wave (FPW), and acoustic plate mode (APM) devices. 65 refs., 4 figs., 2 tabs.
- OSTI ID:
- 5119399
- Journal Information:
- Analytical Chemistry (Washington); (United States), Journal Name: Analytical Chemistry (Washington); (United States) Vol. 65:21; ISSN 0003-2700; ISSN ANCHAM
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
400100* -- Analytical & Separations Chemistry
661300 -- Other Aspects of Physical Science-- (1992-)
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ACOUSTIC MEASUREMENTS
COMPILED DATA
DATA
DETECTION
FLUIDS
GAS ANALYSIS
INFORMATION
INTERFACES
LIQUIDS
MICROANALYSIS
NUMERICAL DATA
SOUND WAVES