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Laser ablated hard coating for microtools

Patent ·
OSTI ID:871524
 [1];  [1]
  1. Berkeley, CA
+ Show Author Affiliations
Wear-resistant coatings composed of laser ablated hard carbon films, are deposited by pulsed laser ablation using visible light, on instruments such as microscope tips and micro-surgical tools. Hard carbon, known as diamond-like carbon (DLC), films produced by pulsed laser ablation using visible light enhances the abrasion resistance, wear characteristics, and lifetimes of small tools or instruments, such as small, sharp silicon tips used in atomic probe microscopy without significantly affecting the sharpness or size of these devices. For example, a 10-20 nm layer of diamond-like carbon on a standard silicon atomic force microscope (AFM) tip, enables the useful operating life of the tip to be increased by at least twofold. Moreover, the low inherent friction coefficient of the DLC coating leads to higher resolution for AFM tips operating in the contact mode.
Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA
DOE Contract Number:
W-7405-ENG-48
Assignee:
Regents Of University Of California (Oakland, CA)
Patent Number(s):
US 5747120
Application Number:
08/799085
OSTI ID:
871524
Country of Publication:
United States
Language:
English

References (2)

Preparation of amorphous diamond-like carbon by pulsed laser deposition: a critical review journal August 1996
Laser plasma source of amorphic diamond journal January 1989

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